In addition to showcasing the microCELL TLS, a production solution for half-cell cutting with Thermal Laser Separation (TLS), 3D-Micromac will introduce its second-generation microCELL OTF system for Laser Contact Opening (LCO) of high-efficiency Passivated Emitter Rear Contact (PERC) solar cells.
The industry-proven microCELL OTF systems produce a selective opening on backside-passivated multi- and monocrystalline solar cells to allow more light to be absorbed by the solar cell. The newly introduced second-generation system provides outstanding productivity with a throughput of more than 8,000 wafers per hour--double the throughput of the previous-generation microCELL OTF system and well above that of competing solutions. This is facilitated by dual-lane wafer handling and on-the-fly laser processing.
The new tool generation meets customers' requirements for inline integration into two- or three-line metallization machinery since the throughput of the single laser process step now matches that of the other process steps in the production line--ensuring that the laser process is not the bottleneck in material flow.
Second-generation microCELL OTF laser system from 3D-Micromac for laser contact opening (LCO) of high-efficiency PERC solar cells. Besides PERC, the tool can also be used for laser-doped selective emitter processes.